Dual-environment-driven MEMS pyrotechnic actuators
نویسندگان
چکیده
Abstract In this paper, through the research on driving mechanism and structure design of MEMS silicon-based actuator that can realize dual-environment force release function, a be released from is designed. It based mass-gear (inertial drive) centrifugal drive design. The achieve 1.5mm output displacement under control 10V DC voltage, condition not less than 5000 r/min, it safety resist overload 10000g. micro-detonation device has high degree integration, initially realizes function releasing inertial environment, good compatibility with technology.
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ژورنال
عنوان ژورنال: Journal of physics
سال: 2023
ISSN: ['0022-3700', '1747-3721', '0368-3508', '1747-3713']
DOI: https://doi.org/10.1088/1742-6596/2478/10/102017